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Customization of microfluidic devices using femtosecond laser micromachining

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Abstract

We use tightly-focused femtosecond laser pulses to add an integrated microcapillary to a microfluidic device fabricated in poly(dimethylsiloxane) (PDMS). Femtosecond laser micromachining together with debris removal by a wetting fluid complements standard soft lithography techniques for microfluidics fabrication in PDMS, allowing the addition of three-dimensional and micrometer-diameter channels to devices.

© 2003 Optical Society of America

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