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Conferences > EUVXRAY > 2018 > JT5A > JT5A.6

Numerical study of laser-produced plasma extreme ultraviolet light emission using dual-pulse scheme

Po-Yen Lai, Kao-Sheng Jao, Rong-Tz Wei, Chia-Ying Hsieh, and Shih-Hung Chen

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Abstract

We numerically demonstrated effects of pre-pulse properties on extreme ultraviolet emission from laser-produced Sn plasmas using a dual-pulse scheme, which increases the EUV conversion efficiency from 3.6% with the single-pulse scheme to 5.9%.

© 2018 The Author(s)

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