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Conferences > EUVXRAY > 2018 > JT5A > JT5A.27

Surface Temperature Distribution of Optical Materials Heated by Laser Irradiation

Nikita Kovalenko, Georgii Aloian, Irina Shebarsina, Alexey Konyashkin, and Oleg Ryabushkin

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Abstract

Equivalent temperature of the silica lens surface was measured at several points during laser irradiation using temperature detectors made of small transparent piezoelectric crystals. Theoretical model for the lens temperature distribution measurement is considered.

© 2018 The Author(s)

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