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Conferences > EUVXRAY > 2018 > ET3B > ET3B.5

A Compact High-Brightness Accelerator-based EUV Source for Actinic Mask Inspection

Yasin Ekinci, Terence Garvey, Leonid Rivkin, Andreas Streun, and Albin Wrulich

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Abstract

The design of a compact electron storage ring for the production of high-brightness EUV radiation is presented. Such a source has potentially important metrology applications in the semiconductor industry.

© 2018 The Author(s)

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