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Conferences > EE > 2017 > ETh2A > ETh2A.3

Spectroscopic investigations of plasma nitriding processes: A comparative study using steel and carbon as active screen materials

S. Hamann, I. Burlacov, H.-J. Spies, H. Biermann, and J. Röpcke

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Abstract

H2-N2-plasmas were investigated spectroscopically in an active screen nitriding reactor to compare the usage (i) of a steel electrode with CH4 admixture and (ii) a carbon electrode without any additional gaseous carbon precursor.

© 2017 Optical Society of America

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