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Conferences > CLEO_SI > 2019 > SW3J > SW3J.4

Suspended group III-V waveguides integrated on silicon substrates for mid-infrared photonics

Jeff Chiles, Eric J. Stanton, Nima Nader, Jeffrey M. Shainline, Sae Woo Nam, and Richard P. Mirin

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Abstract

We demonstrate wafer-scale integration of suspended Al0.32Ga0.68As nanophotonic waveguides on silicon substrates. Micro-ring resonators are fabricated and measured at λ = 1545 and 2305 nm, showing loaded quality factors of 740,000 and 450,000, respectively.

© 2019 The Author(s)

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