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Ultrahigh-Q Crystalline Microresonator Fabricated with Computer-controlled Machining without Polishing

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Abstract

We fabricated crystalline whispering gallery mode microresonators with an ultrahigh Q close to 108 without polishing by employing a computer-controlled ultraprecision machining process. The dispersion of the fabricated device agrees well with the design, which indicates that the resonator cross-section is precisely controlled.

© 2019 The Author(s)

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