Abstract
We deposit a crack-free 780nm-thick Si3N4 film on a dense stress release pattern on a 100mm silicon wafer. Our fabricated waveguide-coupled 920µm-radius Si3N4 disk resonator reveals a high loaded quality factor of 1.7×106.
© 2019 The Author(s)
PDF ArticleMore Like This
A. N. Kamel, H. E. Dirani, M. Casale, S. Kerdiles, C. Socquet-Clerc, M. Pu, L. K. Oxenløwe, K. Yvind, and C. Sciancalepore
JTu2A.120 CLEO: Applications and Technology (CLEO:A&T) 2018
Xinru Ji, Rui Ning Wang, Zheru Qiu, and Tobias J. Kippenberg
ce_8_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023
Kaiyi Wu and Andrew W. Poon
SW4B.4 CLEO: Science and Innovations (CLEO:S&I) 2018