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Single-Step Fabrication of Multispectral Filter Arrays Using Grayscale Lithography and Metal-Insulator-Metal Geometry

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Abstract

Metal-insulator-metal geometries can provide optical transmission filtering, with peak wavelength dependent on insulator thickness. Using grayscale electron beam lithography to control insulator thickness, we fabricate multispectral filter arrays, whereby dose determines wavelength.

© 2018 The Author(s)

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