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Optomechanical coupling to ultra-high Q-factor phononic resonators on-chip at cryogenic temperatures

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Abstract

Through engineerable optomechanical coupling to bulk acoustic modes of plano-convex resonators fabricated on-chip, we demonstrate ultra-high acoustic Q-factors of 28 million (6.6 million) for phonons at high frequencies of 12.7 GHz (37.8 GHz) in quartz (silicon) at cryogenic temperatures.

© 2018 The Author(s)

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