Abstract
Using all-silicon fusion-bonded membrane waveguides, we demonstrate efficient input/output couplers with 1.8 dB loss at λ = 3.06 µm, 1×2 power splitters (Y- and MMI-type), 25 µm bends, and 0.35 dB transitions to fusion-sealed micro-channels.
© 2018 The Author(s)
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