Abstract
We demonstrate plasma-deposited (temperature < 300°C), deuterated silicon nitride waveguides with 0.22 dB/cm propagation loss at λ = 1552 nm. Pumping at λ = 1560 nm, we obtain a 550 nm-bandwidth Kerr-microcomb and octave-spanning supercontinuum.
© 2018 The Author(s)
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