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High-Efficiency Silicon Mach-Zehnder Modulator with U-Shaped PN Junctions

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Abstract

We demonstrate a silicon Mach-Zehnder modulator with U-shaped PN junctions to achieve a high modulation efficiency of 0.34 V∙cm at 0 V bias. On-off key modulation is obtained at 32 Gb/s data rate.

© 2019 The Author(s)

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