Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > CLEO_QELS > 2018 > FW4G > FW4G.1

Self-aligned Fabrication of Microscale Electron Column Array using Plasmonic Enhanced Photoemission

Zhidong Du, Ye Wen, and Liang Pan

Not Accessible

Your library or personal account may give you access

Abstract

Microcolumns are important for parallel electron-beam lithography because of their compactness. A large array of electrostatic microcolumns is numerically optimized for our recent surface plasmon enhanced photoemission sources and demonstrated using a self-aligned fabrication process.

© 2018 The Author(s)

PDF Article
More Like This
Graphene Anti-dot Arrays with Self-aligned Gold Disks for Enhanced Excitation of Terahertz Surface Plasmons

Licheng Xiao, Xianglong Miao, Geng Li, and Peter Qiang Liu
JW2A.75 CLEO: Applications and Technology (CLEO:A&T) 2018

Ultrafast Plasmons Probed by Photoemission Electron Microscopy

Quan Sun, Kosei Ueno, and Hiroaki Misawa
TuD3 International Symposium on Ultrafast Phenomena and Terahertz Waves (ISUPTW) 2018

Interferometric Plasmon Propagation and Lensing with Nanohole Arrays in Gold Films: Visualization by Nonlinear Photoemission Electron Microscopy

Wayne Hess
FTh1E.1 CLEO: QELS_Fundamental Science (CLEO:FS) 2015

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use