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A Monolithically Integrated CMOS-MEMS Infrared Emitter with Graphene Oxide for Emission Enhancement

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Abstract

We demonstrate the emission enhancement of an integrated CMOS-MEMS infrared emitter by using graphene oxide (GO) coating, with an enhancement factor of >2. The characterizations of the GO and the MEMS emitter design are included.

© 2019 The Author(s)

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