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Vertically coupled a-Si:H multimode interference waveguides for multi-layer silicon photonics platform

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Abstract

We successfully demonstrated low temperature fabrication process of vertical MMI a:Si-H waveguides for multi-layer photonic integrated circuit. Measured MMI loss of 1.97dB/MMI and vertical light coupling of TE polarization at 1550nm wavelength have been achieved.

© 2019 The Author(s)

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