Abstract
Hydrogenated amorphous silicon (a-Si:H) has been used in the implementation of many electronic and optoelectronic devices, such as solar cells, thin film transistors, high speed light detectors, etc. The feasibility of depositing a-Si:H waveguide structures on semiconductors makes them attractive for the integration of phase modulators with other active optical devices.
© 1992 Optical Society of America
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