Abstract

Recent development of diode-pumped solid-state lasers introduces the possibility of very compact, solid coherent light sources, i.e., microchip lasers,^1,2 especially in the green and blue optical regions. However, so far as we know, the conventional fabrication technique has just been applied to the laser material and nonlinear optical material, which is expensive and fragile. A more efficient microcavity fabrication technique is strongly desired for their commercial production, and we have developed a new fabrication technique based on photolithography and ion beam etching.

© 1992 Optical Society of America