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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1992),
  • paper CTuD5

Alternate inversion of discharge polarity of a KrF laser using saturable inductors

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Abstract

In discharge-pumped KrF excimer lasers, we frequently observe a big difference in the degradation and damage modes of cathode and anode surfaces; there are sputtered erosion on the cathode surface and noncon elective fluorides on the anode surface. We assume that the difference is due to the asymmetric behavior of laser plasma according to the discharge polarity.

© 1992 Optical Society of America

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