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Conferences > CLEO > 1992 > CTuD > CTuD1
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1992),
  • paper CTuD1

Progress on the AMMTRA project for excimer laser development

Mituso Maeda

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Abstract

The National Research and Development Program (known as the Large-Scale Project in japan) carries out technological R&D activities in various industrial fields in close cooperation with industrial companies and organizations using Japanese government funds. Since 7966, thirty projects have been launched and nine projects are ongoing.

© 1992 Optical Society of America

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