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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1992),
  • paper CThI57

Monolithic integration of dielectric waveguides with semiconductor lasers

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Abstract

Optical waveguide is a key component for optical integrated circuits. Many techniques have been used to fabricate waveguides in semiconductors, which require epitaxial regrowth or different schemes of lattice disordering.1,2 This paper describes a simple but versatile method to monolithically integrate dielectric waveguide on a semiconductor laser wafer.

© 1992 Optical Society of America

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