Optical scanners using a polygon mirror or a hologram disc are widely used in many optical systems such as a laser beam printer or a POS laser scanner. In these systems, a compact scanner is greatly required as the size of the system becomes more compact. Furthermore, a two-dimensional optical scanner is required in the light source of optical sensors in order to measure the two-dimensional physical values of an object. To meet these requirements, we have newly developed a dual axis optical scanner utilizing two deformation modes of a tortional spring driven by a piezoelectric actuator.

© 1991 Optical Society of America

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