For polymers with high ultraviolet absorption coefficients (α>1µm−1) such as polyimide, the measured excimer laser etch depths per pulse over a wide range of fluences significantly exceed the values predicted by Beer's Law for given small-signal absorption coefficients and ablation threshold fluences. This phenomenon can be explained by analyzing the radiation transport, taking into account chromophore saturation of the UV laser pulse.1 This description, which accurately describes the observed ablation behavior, predicts transient decreases in the absorption of the irradiated polymer.

© 1991 Optical Society of America

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