Abstract

High-repetition-rate excimer and CO₂ TEA lasers with output powers extending into the kilowatt range are becoming important in a large number of scientific and industrial applications. Maximum outputs of 750 W have been reported for discharge excited excimer lasers¹ and 10 kW for CO₂ TEA lasers² at repetition rates of 500 Hz and 1 kHz, respectively. However, these lasers are not yet commercially compatible. We have, therefore, initiated an extensive R&D program, aimed at the development of high-repetition rate, high-average-power industrial excimer and CO₂ TEA laser systems with projected repetition rates of several Kilohertz and multi-kilowatt outputs.³

© 1991 Optical Society of America