Abstract

Electrical pulses propagating on microstrip lines suffer dispersion if they contain frequency components above the TE-mode cutoff frequency of the line. Conventional microstrip interconnects in integrated circuits that use a metal film on the backside of the typically 500 μm-thick semiconductor wafer as ground-plane have a cutoff frequency of about 10 GHz (line width about 10 μm).

© 1991 Optical Society of America

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