Potential applications in using UV excimer lasers for surface patterning in microfabrication are well recognized. They include high-resolution two-dimensional and three-dimensional surface patterning and sculpting using excimer lasers in either ablative or non-ablative mode. In these applications, radiation from the excimer laser has to be controlled and delivered accurately onto the surface. The ability to deliver the energy efficiently from a UV laser with a precisely controlled beam energy distribution over the surface area is one of the critical technologies.
© 1991 Optical Society of AmericaPDF Article