Potential applications in using UV excimer lasers for surface patterning in microfabrication are well recognized. They include high-resolution two-dimensional and three-dimensional surface patterning and sculpting using excimer lasers in either ablative or non-ablative mode. In these applications, radiation from the excimer laser has to be controlled and delivered accurately onto the surface. The ability to deliver the energy efficiently from a UV laser with a precisely controlled beam energy distribution over the surface area is one of the critical technologies.

© 1991 Optical Society of America

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