Abstract

Use of transition, metal dichalcogenide compounds as solid lubricants is well accepted, but growing thin films of these materials presents some technological problems. Laser, ablative deposition (LAD) is an attractive alternative to sputter techniques that often produce substoichiometric films. Laser deposition of such films has previously been performed using 532 nm radiation from a doubled YAG source.¹ This process yielded a poor surface morphology due to ejection of spherical particles up to 1 µ in diameter from the target as the result of superheating of the (target) subsurface prior to evaporation (splashing). have successfully demonstrated the growth of solid-lubricant thin films exhibiting good surface morphology and excellent coefficients of friction using LAD at excimer laser wavelengths of 193 nm and 248 nm. Operation at these wavelengths reduced the beam-penetration depth and thermal effects that are present at depositions conducted at 532 nm. We have also extended previous work to include an analysis of the ablation dynamics, as well as a study of the associated plume using time-of- flight techniques.

© 1991 Optical Society of America