Rapid progress is being made in deep ultraviolet microprocessing using a narrowband (<3 pm) KrF excimer laser as a light source.1There are a few commercial narrowband KrF lasers, but their output powers are less than 5 W, which is not enough use in applications.
© 1991 Optical Society of America
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
Login to access OSA Member Subscription