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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1990),
  • paper CWB4

Particulate removal from a surface by excimer laser irradiation

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Abstract

Pulsed laser irradiation of a solid can lead to various types of surface modification effect. For example, well known phenomena include melting, evaporation, ablation, and deposition of materials. Here we report on a new effect, namely, the removal of various particulate contaminants from surfaces by pulsed excimer laser irradiation at 248 and 308 nm.1

© 1990 Optical Society of America

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