Pulsed laser irradiation of a solid can lead to various types of surface modification effect. For example, well known phenomena include melting, evaporation, ablation, and deposition of materials. Here we report on a new effect, namely, the removal of various particulate contaminants from surfaces by pulsed excimer laser irradiation at 248 and 308 nm.1

© 1990 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription