One of the major constraints in the design of optical cavities for mode control of standard excimer lasers is the very few cavity round trips available. This limitation is considerably relaxed in the new, predominantly XeCl, long pulse excimer lasers which exhibit pulse lengths in excess of 200-ns FWHM, In this paper we discuss the design and performance of optical cavities, including stable and unstable resonators with various spectral tuning elements, for a 1-J long pulse XeCl laser described previously.1

© 1990 Optical Society of America

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