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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1990),
  • paper CTUC7

Directional switching of a GaAs/AlGaAs multiple quantum well waveguide coupler with picosecond pulses

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Abstract

Strain-induced waveguides were fabricated by depositing a thin layer of silicon nitride (some 2000 Å) on an GaAs/AlGaAs MQW layer and selectively etching it off using photolithography and plasma enhanced vapor phase etching to leave stripes of SiNx ranging from 4 to 10 μm wide on the surface of the MQW layer. A schematic drawing of the waveguide cross section is shown in Fig. 1.

© 1990 Optical Society of America

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