Abstract

The XeF(C➙A) excimer laser is an efficient scalable source of radiation continuously tunable over an ~50-nm band centered at 485 nm. Using a high current density (150-A/cm2), short pulse (10-ns FWHM) electron-beam excitation source, and kinetically tailored five-component gas mixture,1 laser energy, energy density, and intrinsic efficiency values of >0.8 J, 1.7 J/liter, and 1.3%, respectively, have been demonstrated on a single shot basis.2,3 We report the first demonstration of wavelength-agile tuning of the XeF(CA) laser operating in the repetitively pulsed mode.

© 1990 Optical Society of America

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