As the absorption of most of the materials and the structural resolving power increase with shorter wavelengths, new fields of material processing are opened by excimer lasers emitting in the UV. With regard to typical applications a homogeneous and reproducible beam is required. In addition industrial applications require high average power excimer lasers which have a reliability and durability that are comparable with other lasers or machining tools. Discharge pumped excimer lasers are scalable to increased pulse energy and increased average power by means of larger active volumes and higher repetition rates. High power excimer lasers are under development in Europe within the framework of the joint European research project EUREKA.

© 1990 Optical Society of America

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