Phase-change type recording media are expected to provide high performance optical disks, since they are overwritable with a single laser beam.1,2 We have developed SbTe based alloy film for use as recording layers.3 It is considered that the factors limiting write-erase repeatability must be clarified to improve disk performance. These factors include morphology, hardness, thickness, and residual stress in the protective layers. We think that repeatability is influenced by the morphology of the protective layer; thus we investigated the relationship between them using Si3N4 sputtered protective film, which is widely applied as passivation film.4

© 1990 Optical Society of America

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