Abstract

The preionization and output characteristics of an x-ray preionized discharge pumped KrF laser with a 10-cm electrode spacing are described. The laser has been developed as the final stage amplifier of a short (ps-fs) pulse excimer laser amplification system. The laser system has been described elsewhere.1,2 When the laser was operated at a PFL voltage of VPFL = 400 kV as a XeCl laser oscillator, an output energy of 50 J in an 85-ns optical pulse was extracted from an active volume of ~10 liters.2 For KrF laser experiments, the insulation between the high voltage electrode and the laser chamber was made by a polyvinylidene fluoride insulator. A new Marx generator with a divertor switch was employed for the generation of the e-beam.

© 1989 Optical Society of America

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