A corona-preionized, high repetition rate, excimer discharge laser has a gas life time higher than that of a UV spark preionized laser. In the corona-preionized XeCl laser, a high gas lifetime of >108 shots has been achieved by Butcher and Fahlan.1 However, the efficiencies of corona-preionized, high repetition rate XeCl lasers reported up to now is <2%. This may be due to the lower UV light intensity of the corona discharge compared to that of UV spark arrays. In this research, a new type, high brightness, corona-preionizer using a segmented columnar SrTiO3 dielectric has been developed. It has been applied to the excimer discharge laser, we believe, for the first time. As a result maximum laser efficiency of 2.3% has been obtained in XeCl with an output' energy of 420 mJ.

© 1989 Optical Society of America

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