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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper TUU3

Scanning optical microscopy

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Abstract

The confocal scanning optical microscope (CSOM) has a far better range resolution than the standard microscope. This property makes it possible to optically cross section transparent biological and other materials and determine the profiles of semiconductor devices.

© 1989 Optical Society of America

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