A KrF excimer laser would be useful in micro· processing. For this application the laser spectral linewidth is narrowed to avoid chromatic aberration in the lens. Injection-locked lasers were applied to the early experiments,1 but they have disadvantages in handling and maintenance and the generation of speckle due to their high spatial coherence. Recently, single resonator type, narrow linewidth excimer lasers were developed2-4 and applied to microprocessing.

© 1989 Optical Society of America

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