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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper THF5

High power long pulse excimer laser

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Abstract

Splker-sustainer circuitry with magnetic switch isolation1,2 when applied to XeGl excimer lasers provides the capability to scale to high pulse energies without undue stress on electrical components. Long optical pulses are achieved by providing a current pulse sufficient to sustain lasing for times in excess of 200 ns (and up to 1.5 μs1) in a discharge which is impedance matched to the energy storage pulse forming network.

© 1989 Optical Society of America

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