Abstract
The operation of a XeCl excimer laser with 300 W of average output power at a pulse rate of 500 Hz is described. The output energy remains nearly constant with increasing repetition rate as shown in Fig. 1. Corona preionization and magnetic switching are used for reliability and simplicity. The physical and performance characteristics of the laser system, primarily during XeCl operation but including results obtained with fluorine halides, are described.
© 1986 Optical Society of America
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