Abstract
One of the fundamental lifetime issues of xenon-chloride lasers is the deterioration of the laser optics.1–3 The cause of the optics' deterioration is a contaminant deposited on the optic by the laser gas.1,2 Evaluation of the contaminant layer by surface analysis techniques has revealed it is caused by several distinct laser-assisted photochemical reactions.
© 1986 Optical Society of America
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