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Optical and structural analysis of laser-oxidized copper films

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Abstract

The kinetics of copper oxidation are known to be a key factor in determining the structure and phase of the oxide, even when this oxide is grown in quasi-equilibrium conditions, e.g., in a furnace.1 Temperature, oxygen pressure, and metal film structure and purity have all been found to be important parameters. The use of a laser as a heat source provides the opportunity to study copper oxidation in very different conditions, in particular, the relatively short time scale and steep thermal gradients (both spatial and temporal) may play an important role. In this study, the kinetics of laser-induced oxidation have been followed using time-resolved reflectance measurements, an approach frequently used for investigations of this type. However, to derive meaningful physical Information from the optical data, complementary measurements, e.g., of morphology and composition, are required to check the validity of assumptions made in analyzing the reflectivity curves. Accordingly, structural analyses of the oxide films using scanning electron and Auger microscopies have also been made.

© 1986 Optical Society of America

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