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Two-pulse ablation of polyimide

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Abstract

Excimer laser pulses can efficiently ablate polyimide. The ablation depth per pulse rapidly increases with laser fluence above a threshold and then saturates at high fluences. Determining the total ablation depth due to two sequential pulses as a function of separation time can yield information about pulse width effects and provide insight into ablation mechanisms.

© 1986 Optical Society of America

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