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Raman microprobe study of structural changes in thin films irradiated by multiple laser pulses

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Abstract

We have used a Raman microprobe to detect and characterize structural changes produced in thin films irradiated by one or many laser pulses. Although they are of importance for laser processing of materials and laser-induced damage, the transformations produced by repeated illumination below single-shot threshold1 are poorly understood. We demonstrate that Raman scattering with 1-μm spatial resolution detects minute localized changes that are not observed by Nomarski microscopy. Furthermore, we obtain quantitative information on these changes which could not be obtained by other methods.

© 1985 Optical Society of America

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