Abstract

Two laser-heated gas phase synthesis processes have been developed; powders are made in one and thin films in the other. In both chemical vapor deposition (CVD) processes, the absorbed IR photon energy is thermalized through intermolecular collisions; the reactions proceed conventionally. The processes were developed because they permit unusual time-temperature histories to be induced in the reactants with superior process control. Combined with high purities made possible with cold-wall reaction vessels, these attributes permit the synthesis of highly valued products.

© 1985 Optical Society of America