Abstract

We report measurements of energy distributions of Al atoms and AIO molecules produced by 248-nm excimer laser ablation of Al₂O₃. The atoms and molecules are detected by laser-induced fluorescence using a pulsed dye laser which is delayed with respect to the excimer laser pulse. With this technique, the desorbed species can be detected with excimer laser fluences below the threshold for formation of a laser-produced plasma and with <1 monolayer of material ablated per pulse.

© 1985 Optical Society of America