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Interferometry with extended unambiguous range: A system

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Abstract

Interferometry has traditionally been a highly useful tool for converting distance or phase information in a wave front to irradiance. With the coherence length of the source extending over many wavelengths, this mapping becomes strictly periodic resulting in an unambiguous range of only half of a wavelength. Using some version of phase shifting interferometry,1,2 this range can be extended to one wavelength. This ambiguity represents a serious limitation for such applications as profilometry, displacement measurement, and wave front sensing. These applications typically require processing of the resultant interferogram to obtain the desired range-sensitivity combination. This processing step is generally time-consuming precluding real-time measurements. We describe a new technique which allows real-time unambiguous measurement over a range of several wavelengths. The system combines polychromatic illumination with controlled phase shifting and employs very simple image processing steps.

© 1985 Optical Society of America

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