Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Scanning laser microscope for in-process inspection of semiconductor wafers

Not Accessible

Your library or personal account may give you access

Abstract

A laser scanning microscope has been developed which permits in-process inspection of patterned semiconductor wafers. In addition to its ability to produce images similar to those obtained using conventional microscopes, tine laser microscope can produce an image of the particulates contaminating the semiconductor surface without imaging the pattern itself. These separate images (in video format) can be combined through addition and subtraction to produce other useful images.

© 1982 Optical Society of America

PDF Article
More Like This
Laser-Scanning Inspection Microscope System

F. Merkle, J. Bille, S. Hunklinger, T. Karte, R.W. Wijnaendts, and R. Kaplan
ThA2 Machine Vision (MV) 1985

Development of laser-terahertz emission microscope for inspecting the electrical faults in semiconductor devices

Masatsugu Yamashita, Toshihiko Kiwa, Masayoshi Tonouchi, and Kodo Kawase
CThN5 Conference on Lasers and Electro-Optics (CLEO:S&I) 2004

Laser scanning microscopes

YOSHIAKI HORIKAWA, MITSUNORI YAMAMOTO, and KIMIAKI YAMAMOTO
WS1 Conference on Lasers and Electro-Optics (CLEO:S&I) 1988

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved