Abstract
A closed-loop XeCI laser (Mistral) operating at 100-mJ/pulse and repetition rates up to 1500 pps is being used to develop long lifetime high-power rare-gas-halide excimer laser technology. The laser system is equipped with acoustic dampers, window purge flow, a gas reprocessing loop, a tube fin/heat exchanger, a centrifugal blower, and a long life pulse modulator.
© 1982 Optical Society of America
PDF ArticleMore Like This
Wayne D. Kimura, Stephen E. Moody, Philip E. Cassady, Stanley R. Byron, and J. J. Ewing
WF5 Conference on Lasers and Electro-Optics (CLEO:S&I) 1983
Stephen E. Moody, George J. Mullaney, William Grossman, Philip E. Cassaday, and Stanley Byron
ME6 Laser Techniques for Extreme Ultraviolet Spectroscopy (EUVS) 1982
Bruno Godard, Emmanuel Estocq, Pierre Murer, Marc Stehle, Jean Bonnet, and Daniel Pigache
CTuT4 Conference on Lasers and Electro-Optics (CLEO:S&I) 1992