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Tunable Picosecond Deep-UV Laser System for Semiconductor Inspection at 213 nm

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Abstract

We report a high-repetition-rate, picosecond fiber master-oscillator and power-amplifier system operating at 120 and 240 MHz in the pulse range of 28-87 ps and its fifth-harmonic generation for semiconductor inspection at 213 nm.

© 2019 The Author(s)

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